Patterning of nanoparticulate transparent conductive ITO films using UV light irradiation and UV laser beam writing

被引：23

作者：

Solieman, A. ^{[1
]}

Moharram, A. H. ^{[2
]}

Aegerter, M. A. ^{[3
]}

机构：

[1] Al Azhar Univ, Fac Sci, Dept Phys, Assiut Branch, Cairo, Egypt

[2] Assiut Univ, Fac Sci, Dept Phys, Assiut, Egypt

[3] Univ Saarland, INM, Coating Technol Dept, Saarland, Germany

来源：

APPLIED SURFACE SCIENCE | 2010年 / 256卷 / 06期

关键词：

Patterning; UV light irradiation; UV laser beam writing; Nanoparticles; ITO film; OXIDE THIN-FILMS; COATINGS; LITHOGRAPHY; DEPOSITION; ABLATION;

D O I：

10.1016/j.apsusc.2009.10.039

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Indium tin oxide (ITO) thin film is one of the most widely used as transparent conductive electrodes in all forms of flat panel display (FPD) and microelectronic devices. Suspension of already crystalline conductive ITO nanoparticles fully dispersed in alcohol was spun, after modifying with coupling agent, on glass substrates. The low cost, simple and versatile traditional photolithography process without complication of the photoresist layer was used for patterning ITO films. Using of UV light irradiation through mask and direct UV laser beam writing resulted in an accurate linear, sharp edge and very smooth patterns. Irradiated ITO film showed a high transparency (similar to 85%) in the visible region. The electrical sheet resistance decrease with increasing time of exposure to UV light and UV laser. Only 5 min UV light irradiation is enough to decrease the electrical sheet resistance down to 5 k Omega square. (C) 2009 Elsevier B. V. All rights reserved.

引用

页码：1925 / 1929

页数：5

共 42 条

[1] Transparent conducting coatings made by chemical nanotechnology processes
Aegerter, MA
Al-Dahoudi, N
Solieman, A
Kavak, H
Oliveira, P
[J]. MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2004, 417 : 589 - 598
[2] Al-Dahoudi N, 2004, CERAM TRANS, V148, P147
[3] Al-Dahoudi N., 2002, Materials Science, V20, P71
[4] Al-Dahoudi N, 2002, MOL CRYST LIQ CRYST, V374, P91
[5] Investigation of annealing effects on sol-gel deposited indium tin oxide thin films in different atmospheres
Alam, MJ
Cameron, DC
[J]. THIN SOLID FILMS, 2002, 420 : 76 - 82
[6] ALDAHOUDI N, 2003, THESIS SAARLAND U GE
[7] Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates
Asakuma, N
Fukui, T
Toki, M
Imai, H
[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2003, 27 (01) : 91 - 95
[8] Crystallization and reduction of sol-gel-derived zinc oxide films by irradiation with ultraviolet lamp
Asakuma, N
Hirashima, H
Imai, H
Fukui, T
Toki, M
[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2003, 26 (1-3) : 181 - 184
[9] Photocrystallization of amorphous ZnO
Asakuma, N
Hirashima, H
Imai, H
Fukui, T
Maruta, A
Toki, M
Awazu, K
[J]. JOURNAL OF APPLIED PHYSICS, 2002, 92 (10) : 5707 - 5710
[10] Formation of patterned microstructures of polycrystalline ceramics from precursor polymers using micromolding in capillaries
Beh, WS
Xia, YN
Qin, D
[J]. JOURNAL OF MATERIALS RESEARCH, 1999, 14 (10) : 3995 - 4003

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