Fabrication and characterization of sub-100/10nm planar nanofluidic channels by triple thermal oxidation and silicon-glass anodic bonding

被引：10

作者：

Ouyang, Wei ^{[1
]}

Wang, Wei ^{[1
,2
]}

机构：

[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China

[2] Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China

来源：

BIOMICROFLUIDICS | 2014年 / 8卷 / 05期

基金：

中国国家自然科学基金;

关键词：

ION-TRANSPORT; PROTEIN PRECONCENTRATION; NANOCHANNELS; DNA;

D O I：

10.1063/1.4894160

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

We reported the fabrication and characterization of nanofluidic channels by Triple Thermal Oxidation and Silicon-Glass Anodic Bonding. Planar nanochannels with depths from sub-100 nm down to sub-10 nm were realized by this method. A theoretical model was developed to precisely predict the depth of nanochannels. The depth and uniformity of nanochannels showed good stability during anodic bonding. This method is promising for various nanofluidic studies, such as nanofluidic electrokinetics, biomolecule manipulation, and energy conversion. (C) 2014 AIP Publishing LLC.

引用

页数：11