Self-focused high frequency ultrasonic transducers based on ZnO piezoelectric films

被引：75

作者：

Zhou, Q. F. ^{[1
]}

Sharp, C.

Cannata, J. M.

Shung, K. K.

Feng, G. H.

Kim, E. S.

机构：

[1] Univ So Calif, Dept Biomed Engn, Los Angeles, CA 90089 USA

[2] Univ So Calif, NIH Transducer Resource Ctr, Los Angeles, CA 90089 USA

[3] Univ So Calif, Dept Elect Engn Electrophys, Los Angeles, CA 90089 USA

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 11期

基金：

美国国家卫生研究院;

关键词：

D O I：

10.1063/1.2712813

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A micromachined self-focusing high frequency ultrasonic transducer was fabricated with a 13 mu m thick ZnO film deposited on a silicon substrate by sputtering. X-ray diffraction shows that the film has a high (002) orientation. The element aperture size of the transducer was 2.5 mm, and the fundamental resonant frequency was designed to be over 200 MHz with approximately 28% bandwidth through only one matching layer. Experimental results show that this type of focused high frequency ultrasound device may have potential for cellular microstructure imaging and skin cancer detection. (c) 2007 American Institute of Physics.

引用

页数：3

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