SiNx-submicrometer coatings:: Optimization of film properties

被引：0
|
作者：
Tikana, L
Pohl, M
Zösch, A
Zahn, W
Wuttke, W
机构：
[1] Ruhr Univ Bochum, D-44801 Bochum, Germany
[2] Westsach Hsch Zwickau, D-08012 Zwickau, Germany
来源：
ADVANCED ENGINEERING MATERIALS | 2000年 / 2卷 / 1-2期
关键词：
D O I：
10.1002/(SICI)1527-2648(200002)2:1/2<53::AID-ADEM53>3.0.CO;2-F
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：53 / 56
页数：4
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