A new two-beam differential resonant micro accelerometer

被引：9

作者：

Comi, Claudia ^{[1
]}

Corigliano, Alberto ^{[1
]}

Langfelder, Giacomo ^{[2
]}

Longoni, Antonio ^{[2
]}

Tocchio, Alessandro ^{[2
]}

Simoni, Barbara ^{[3
]}

机构：

[1] Politecn Milan, Dept Struct Engn, Piazza Leonardo Vinci 32, I-20133 Milan, Italy

[2] Politecn Milan, Dept Elect & Informat, I-20133 Milan, Italy

[3] STMicroelect, Milan, Italy

来源：

2009 IEEE SENSORS, VOLS 1-3 | 2009年

关键词：

D O I：

10.1109/ICSENS.2009.5398209

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel uniaxial micro-machined resonant accelerometer is presented. The device working principle is based on the stiffness variations of a beam which is fully clamped to the substrate on one side and clamped to a seismic mass on the other side. A movement of the seismic mass, induced by an external acceleration, causes either a compressive or a tensile stress on the beam, inducing a variation of its stiffness. This variation results in a change of the resonance frequency of the beam. The accelerometer is arranged in a differential structure, with two beams built in such a way that their changes in the resonance frequency have opposite sign. This solution allows obtaining a doubled sensitivity with the same area and allows reducing the non linear behavior. First experimental results show that the device has an overall differential sensitivity Delta f(res)/g approximate to 450 Hz/g in the linear range of operation, with an overall area occupation lower than (500 mu m)(2).

引用

页码：158 / +

页数：2

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