Surface hydroxyl content controls the thermolysis stoichiometry of a surface bound organometallic complex

被引：27
作者：
Lu, G [1 ]
Purvis, KL [1 ]
Schwartz, J [1 ]
Bernasek, S [1 ]
机构：
[1] PRINCETON UNIV,DEPT CHEM,PRINCETON,NJ 08544
来源：
LANGMUIR | 1997年 / 13卷 / 22期
关键词：
D O I：
10.1021/la9709507
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The thermal decomposition profile for the product of organometallic chemical vapor deposition (OMCVD) of tetra(tert-butoxy)zirconium on an oxide-modified aluminum surface depends on the initial surface hydroxyl group coverage. Controlled thermolysis of the tri(tert-butoxy)zirconium species bound to the low hydroxyl group content surface shows nearly complete degradation to ZrO2 at T > 350 K. In contrast, thermolysis of the tri(tert-butoxy)zirconium species bound to the hydroxyl group-saturated surface gives a thermally more stable (to >450 K) di(tert-butoxy)zirconium surface complex. Deposition and thermal evolution reactions were followed by both reflection-absorption infrared and X-ray photoelectron spectroscopies.
引用
收藏
页码：5791 / 5793
页数：3
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