Laser micromachining - New developments and applications

被引：8

作者：

Rizvi, N ^{[1
]}

Milne, D ^{[1
]}

Rumsby, P ^{[1
]}

Gower, M ^{[1
]}

机构：

[1] Exitech Ltd, Oxford OX8 8LH, England

来源：

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING V | 2000年 / 3933卷

关键词：

lasers; micromachining; excimer; ablation; MST devices; ultrashort pulses;

D O I：

10.1117/12.387562

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Excimer laser micromachining has developed into a mature production method and many industrial applications such as the drilling of ink-jet printer nozzles, production of sensors and the manufacture of display panels now routinely use excimer laser microprocessing in production environments. The important concepts of excimer laser micromachining systems are described and the novel methods which have been developed in this area are presented. In particular, techniques for the production of complex, multi-level 3D microstructures are described and examples of such features are used to illustrate the relevant applications. Furthermore, some initial micromachining results from a sub-nanosecond, solid-state fibre laser are presented to highlight the rapidly-growing area of laser microprocessing using ultra-short pulse lasers.

引用

页码：261 / 271

页数：11