Crystallization of BaTiO3 thin film at 140 °C by metalorganic decomposition hydrothermal method using TiO2 precursor

BaTiO3 thin films with perovskite structure have been prepared on Pt/Ti/SiO2/Si substrate using a combined process of conventional MOD process and a hydrothermal treatment using TiO2 precursor. The BaTiO3 thin films were crystallized on silicon by hydrothermal treatment at temperature of 140 degreesC. The structure development, stoichiometry, spectroscopic, and dielectric properties of BaTiO3 thin films have been systematically investigated. X-ray diffraction patterns show that well-developed crystallites with perovskite phase have been formed. BaTiO3 thin film obtained by the mono-treatment process shows (100) preferred orientation, but TiO2 peak still exists which indicated that the reaction is not completed. The stoichiometric BaTiO3 thin films with a (110) preferred orientation were obtained by the multi-treatment process. AFM observation shows that the roughness of surface is improved with the multi-treatment process. The electric properties of the sample prepared by the multi-treatment process is better than that prepared by the mono-treatment process.