Robust control of piezostage for nanoscale three-dimensional images acquisition

被引：0

作者：

Cavanini, Luca ^{[1
]}

Corradini, Maria Letizia ^{[2
]}

Criante, Luigino ^{[3
]}

Di Donato, Andrea ^{[1
]}

Farina, Marco ^{[1
]}

Ippoliti, Gianluca ^{[1
]}

Lo Turco, Sara ^{[3
]}

Orlando, Giuseppe ^{[1
]}

Travaglini, Carmine ^{[1
]}

机构：

[1] Univ Politecn Marche, Dipartimento Ingn Informaz, I-60131 Ancona, Italy

[2] Univ Camerino, Scuola Sci & Tecnol, I-62032 Camerino, MC, Italy

[3] Ist Italiano Tecnol, Ctr NanoSci & Technol PoliMi, I-20133 Milan, Italy

来源：

PROCEEDINGS OF THE IECON 2016 - 42ND ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY | 2016年

关键词：

SLIDING MODE CONTROL; SPEED; FEEDFORWARD; TOMOGRAPHY; HYSTERESIS; MICROSCOPY; ACTUATORS; OBSERVER;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Piezoelectric drivers are widely used in nanoscale image acquisition systems. A source of performance degradation of these drivers is hysteresis, which introduces low rate noise and causes a slow continuous drift, decreasing the quality of scanned images. In this paper a sliding mode control policy, based on an estimator of the perturbation due to hysteresis, is applied to the control of a piezostage in a three dimensional images acquisition system, in order to improve control performances and final scanning results. The presented solution has been experimentally tested and compared with the Proportional-Integrative-Derivative (PID) controllers provided with the piezoelectric acquisition system, showing a noticeable improvement both in the piezostage behavior and in the images quality.

引用

页码：5107 / 5112

页数：6

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