Optical Accelerometers for Detecting Low-Frequency Micro-Vibrations

被引:18
作者
Lei, Ying-Jun [1 ,2 ]
Li, Rui-Jun [1 ,2 ]
Zhang, Lian-Sheng [1 ,2 ]
Hu, Peng-Hao [1 ,2 ]
Huang, Qiang-Xian [1 ,2 ]
机构
[1] Hefei Univ Technol, Sch Instrument Sci & Optoelect Engn, Hefei 230009, Peoples R China
[2] Hefei Univ Technol, Anhui Prov Key Lab Measuring Theory & Precis Inst, Hefei 230009, Peoples R China
来源
APPLIED SCIENCES-BASEL | 2022年 / 12卷 / 08期
基金
中国国家自然科学基金; 国家重点研发计划;
关键词
accelerometer; optical sensing systems; optical modulation; accelerometer review; BRAGG GRATING ACCELEROMETER; FIBEROPTIC ACCELEROMETER; MEMS ACCELEROMETER; DESIGN; SENSOR; MODULATION; DISPLACEMENT; OPTIMIZATION; PROPOSAL;
D O I
10.3390/app12083994
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Optical accelerometers are high-precision inertial sensors that use optical measurement technology to achieve high-precision and electromagnetic interference-resistant acceleration measurements. With the intensive research and development of optical accelerometers in recent years, their applications in inertial navigation, structural health monitoring, precision vibration isolation systems, wind turbine fault monitoring, earthquake monitoring, and other low-frequency vibration detection have flourished. Optical accelerometers have various schemes; however, their characteristics vary considerably due to different optical modulation schemes. This study aims to address the lack of systematic evaluation of currently available low-frequency optical accelerometers. Optical accelerometers can be classified into four categories in accordance with their optical modulation schemes: optical path-, optical intensity-, optical phase-, and optical wave-length-modulated accelerometers. The typical performance, advantages and disadvantages, and possible application scenarios of various optical accelerometers are summarized. This study also presents the current status and trends of low-frequency optical accelerometers in consideration of the growing demand for high-precision, low-frequency acceleration measurements.
引用
收藏
页数:21
相关论文
共 95 条
[51]   Development of a multi-point polarization-based vibration sensor [J].
Linze, Nicolas ;
Tihon, Pierre ;
Verlinden, Olivier ;
Megret, Patrice ;
Wuilpart, Marc .
OPTICS EXPRESS, 2013, 21 (05) :5606-5624
[52]   Linearity considerations in polarization-based vibration sensors [J].
Linze, Nicolas ;
Tihon, Pierre ;
Verlinden, Olivier ;
Megret, Patrice ;
Wuilpart, Marc .
APPLIED OPTICS, 2012, 51 (29) :6997-7004
[53]   Extrinsic Fabry-Perot Cantilever Accelerometer Based on Micromachined 45° Angled Fiber [J].
Liu, Bin ;
Zhong, Zhi ;
Lin, Jie ;
Wang, Xing ;
Liu, Lei ;
Shan, Mingguang ;
Jin, Peng .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2018, 36 (11) :2196-2203
[54]   Optimal design of high-g MEMS piezoresistive accelerometer based on Timoshenko beam theory [J].
Liu, Feng ;
Gao, Shiqiao ;
Niu, Shaohua ;
Zhang, Yan ;
Guan, Yanwei ;
Gao, Chunhui ;
Li, Ping .
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018, 24 (02) :855-867
[55]  
Liu J., 2005, J U SHANGHAI SCI TEC, V27, P185, DOI [10.13255/j.cnki.jusst.2005.02.021, DOI 10.13255/J.CNKI.JUSST.2005.02.021]
[56]   Large Frequency Range and High Sensitivity Fiber Bragg Grating Accelerometer Based on Double Diaphragms [J].
Liu, Qinpeng ;
Qiao, Xueguang ;
Jia, Zhen'an ;
Fu, Haiwei ;
Gao, Hong ;
Yu, Dakuan .
IEEE SENSORS JOURNAL, 2014, 14 (05) :1499-1504
[57]   Development of an optical accelerometer for low-frequency vibration using the voice coil on a DVD pickup head [J].
Liu, Yi-Cheng ;
Fan, Kuang-Chao ;
Chu, Chih-Liang ;
Werner, Christian Andreas ;
Jaeger, Gerd .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2008, 19 (08)
[58]   Integrated polymer optical accelerometer [J].
Llobera, A ;
Seidemann, V ;
Plaza, JA ;
Cadarso, VJ ;
Büttgenbach, S .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2005, 17 (06) :1262-1264
[59]   SU-8 optical accelerometers [J].
Llobera, Andreu ;
Seidemann, Volker ;
Plaza, Jose A. ;
Cadarso, Victor Javier ;
Buettgenbach, Stephanus .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (01) :111-121
[60]   Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs [J].
Lu, Qianbo ;
Bai, Jian ;
Wang, Kaiwei ;
Chen, Peiwen ;
Fang, Weidong ;
Wang, Chen .
SENSORS, 2018, 18 (07)