Study of the phase composition of nanostructures produced by the local anodic oxidation of titanium films

被引：6

作者：

Avilov, V. I. ^{[1
]}

Ageev, O. A. ^{[1
]}

Konoplev, B. G. ^{[1
]}

Smirnov, V. A. ^{[1
]}

Solodovnik, M. S. ^{[1
]}

Tsukanova, O. G. ^{[1
]}

机构：

[1] Southern Fed Univ, Inst Nanotechnol Elect & Equipment Engn, Taganrog 347928, Russia

来源：

SEMICONDUCTORS | 2016年 / 50卷 / 05期

基金：

俄罗斯基础研究基金会;

关键词：

Titanium Film; Titanium Hydride; Oxide Nanostructures; Titanium Thin Film; Local Anodic Oxidation;

D O I：

10.1134/S1063782616050043

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The results of experimental studies of the phase composition of oxide nanostructures formed by the local anodic oxidation of a titanium thin film are reported. The data of the phase analysis of titanium-oxide nanostructures are obtained by X-ray photoelectron spectroscopy in the ion profiling mode of measurements. It is established that the surface of titanium-oxide nanostructures 4.5 +/- 0.2 nm in height possesses a binding energy of core levels characteristic of TiO2 (458.4 eV). By analyzing the titanium-oxide nanostructures in depth by X-ray photoelectron spectroscopy, the formation of phases with binding energies of core levels characteristic of Ti2O3 (456.6 eV) and TiO (454.8 eV) is established. The results can be used in developing the technological processes of the formation of a future electronic-component base for nanoelectronics on the basis of titanium-oxide nanostructures and probe nanotechnologies.

引用

页码：601 / 606

页数：6

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