Langasite surface acoustic wave sensors for high temperatures

被引：27

作者：

Honal, M

Fachberger, R

Holzheu, T

Riha, E

Born, E

Pongratz, P

Bausewein, A

机构：

[1] Siemens AG, Corporate Technology

[2] Australian National University, Canberra, ACT

来源：

PROCEEDINGS OF THE 2000 IEEE/EIA INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & EXHIBITION | 2000年

关键词：

D O I：

10.1109/FREQ.2000.887339

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Langasite (La3Ga5SiO14) has been used successfully as a piezoelectric substrate for surface acoustic wave (SAW) devices operating up to 1000 degreesC. New investigations of material properties concerning the quality as well as the stability at high temperatures are presented. Apart from high temperature measurements on SAW devices and thermal analyses, optical absorption properties and the electric conductivity have been investigated. The crystal quality has been examined by various methods like Xray topography (XRT) and chemical etching combined with optical microscopy for many LGS wafers from different growers.

引用

页码：113 / 118

页数：4

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