Structure, hardness and tribological properties of nanolayered TiN/TaN multilayer coatings

被引:38
作者
An, J. [1 ]
Zhang, Q. Y.
机构
[1] Dalian Univ Technol, State Key Lab Laser Ion & Electron Beams, Dalian 116023, Peoples R China
[2] Jilin Univ, Dept Mat Sci & Engn, Minist Educ, Key Lab Automobile Mat, Changchun 130025, Peoples R China
基金
中国国家自然科学基金;
关键词
TiN/TaN multilayered coating; hardness; coefficient of friction; wear resistance;
D O I
10.1016/j.matchar.2006.06.012
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
TiN/TaN coatings, consisting of alternating nanoscaled TiN and TaN layers, were deposited using magnetron sputtering technology. The structure, hardness, tribological properties and wear mechanism were assessed using X-ray diffraction, microhardness, ball-on-disc testing and a 3-D surface profiler, respectively. The results showed that the TiN/TaN coatings exhibited a good modulation period and a sharp interface between TiN and TAN layers. In mutilayered TiN/TaN coatings, the TiN layers had a cubic structure, but a hexagonal structure emerged among the TAN layers besides the cubic structure as the modulation period went beyond 8.5 nm. The microhardness was affected by the modulation period and a maximum hardness value of 31.5 GPa appeared at a modulation period of 8.5 nm. The coefficient of friction was high and the wear resistance was improved for TiN/TaN coatings compared with a homogenous TiN coating, the wear mechanism exhibited predominantly ploughing, material transfer and local spallation. (c) 2006 Elsevier Inc. All rights reserved.
引用
收藏
页码:439 / 446
页数:8
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