Study on film resistivity of Energy Conversion Components for MEMS Initiating Explosive Device

被引：0

作者：

Ren, Wei ^{[1
,2
]}

Zhang, Bin ^{[2
]}

Zhao, Yulong ^{[1
]}

Chu, Enyi ^{[2
]}

Yin, Ming ^{[2
]}

Li, Hui ^{[2
]}

Wang, Kexuan ^{[2
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China

[2] Shaanxi Appl Phys Chem Res Inst, Sci & Technol Appl Phys Chem Lab, Xian 710061, Shaanxi, Peoples R China

来源：

19TH ANNUAL CONFERENCE AND 8TH INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY (CSMNT2017) | 2018年 / 986卷

关键词：

MEMS energy conversion component; Scale effect; resistivity;

D O I：

10.1088/1742-6596/986/1/012004

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Resistivity of Plane-film Energy Conversion Components is a key parameter to influence its resistance and explosive performance, and also it has important relations with the preparation of thin film technology, scale, structure and etc. In order to improve the design of Energy Conversion Components for MEMS Initiating Explosive Device, and reduce the design deviation of Energy Conversion Components in microscale, guarantee the design resistance and ignition performance of MEMS Initiating Explosive Device, this paper theoretically analyzed the influence factors of film resistivity in microscale, through the preparation of Al film and Ni-Cr film at different thickness with micro/nano, then obtain the film resistivity parameter of the typical metal under different thickness, and reveals the effect rule of the scale to the resistivity in microscale, at the same time we obtain the corresponding inflection point data.

引用

页数：9

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