Precision polishing of the mandrel for X-ray grazing incidence mirrors

被引：1

作者：

Zuo, Fuchang ^{[1
]}

Li, Liansheng ^{[1
]}

Mei, Zhiwu ^{[1
]}

Hu, Hao ^{[2
]}

Deng, Loulou ^{[1
]}

Li, Yueming ^{[1
]}

Kang, Renke ^{[3
]}

Xie, Jun ^{[4
]}

Shi, Yongqiang ^{[1
]}

Chen, Jianwu ^{[1
]}

机构：

[1] Beijing Inst Control Engn, Beijing 100190, Peoples R China

[2] Natl Univ Def Technol, Coll Intelligence Sci, Changsha 410073, Peoples R China

[3] Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China

[4] Beijing Inst Spacecraft Syst Engn, Beijing 100194, Peoples R China

来源：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2022年 / 118卷 / 1-2期

关键词：

Precision polishing; Mandrel; X-ray grazing incidence mirror; Material removal model; Roughness; PERFORMANCE; OPTIMIZATION; REMOVAL; CHANDRA; DESIGN; MOLD;

D O I：

10.1007/s00170-021-07185-1

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Based on chemical-mechanical polishing, a precision polishing method is proposed to accommodate the polishing of the paraboloid surface of the specified mandrel for grazing incidence X-ray mirrors. The influencing factors in the polishing are analyzed to confirm the method complies with the Preston equation and Hertz contact theory. Therefore, the common material removal model based on these two theories is adopted. The effects of processing parameters, such as the force F between the mandrel and the polishing lap, the rotational speed n of the mandrel, and the axial speed v(a) of the polishing lap, on the material removal rate are simulated, respectively. A polishing setup is established to carry out experimental polishing to verify the optimum processing parameters obtained by simulations and previous polishing tests. Besides, the effect of abrasive particle size on the roughness is also verified. The roughness of the polished mandrel is measured at different positions, and the optimum roughness reaches Ra 0.659 nm. The polishing approach can significantly reduce the surface roughness of the replication mandrel, satisfying the low energy band focusing requirement of grazing incidence X-ray mirrors.

引用

页码：43 / 53

页数：11

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