Impregnation of Ni-P metal into polymer substrate via catalyzation in Sc-CO2 and electroless plating in Sc-CO2 emulsion

被引:6
作者
Woo, Byung-Hoon [1 ]
Sone, Masato [1 ]
Shibata, Akinobu [1 ]
Ishiyama, Chiemi [1 ]
Edo, Susumu [2 ]
Tokita, Masatoshi [2 ]
Watanabe, Junji [2 ]
Higo, Yakichi [1 ]
机构
[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
[2] Tokyo Inst Technol, Dept Organ & Polymer Mat, Meguro Ku, Tokyo 1528552, Japan
关键词
Supercritical carbon dioxide; Polyimide; Electroless plating; Transport property; Emulsion; Diffusion; CARBON-DIOXIDE; DIFFUSION-COEFFICIENTS; COPPER METALLIZATION; POLYIMIDE SUBSTRATE; DEPOSITION; CU;
D O I
10.1016/j.surfcoat.2009.11.010
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this study we investigated the impregnation of Ni-P metal into polymer substrate via catalyzation in supercritical carbon dioxide (Sc-CO2) and electroless plating in Sc-CO2 emulsion, in comparison with calculated CO2 diffusion in polymer on the basis of Fick's law. Sc-CO2 has two major effects, high diffusivity and good chemical affinity with polymer, on the impregnation of Ni-P metal into the polyimide substrate. Our group fabricated an Ni-P thin film in Sc-CO2 With an electroless plating emulsion after catalyzing the Sc-CO2 with Pd complex. According to an EDX analysis, an increase in the Sc-CO2 catalyzation time led to increases in both the intensity and depth of the Ni-ion penetration into the polyimide. We found that the impregnation reaction of Ni by our novel method is CO2 diffusion controlling reaction. To clarify which of the two Sc-CO2 properties, diffusivity or chemical affinity, played a dominant role, we conducted an electroless plating reaction with emulsion using hexane as the catalyzation solvent whose diffusivity is lower than that of Sc-CO2. The good affinity with polyimide in the hexane catalyzation led to a film fabrication of Ni-P thin films, but numerous cracks were visible on the films under microscopic observation. According to an EDX analysis of the Ni-P catalyzed in hexane, the intensity of the penetrated Ni-ions into the polyimide was very low. The high diffusivity of the Sc-CO2 promoted the penetration of the Pd catalyst and Ni-P electroless plating solution into the polyimide substrate. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:1785 / 1792
页数:8
相关论文
共 31 条
  • [1] Supercritical carbon dioxide assisted electroless plating on thermoplastic polymers
    Adachi, Hirobumi
    Taki, Kentaro
    Nagamine, Shinsuke
    Yusa, Atsushi
    Ohshima, Masahiro
    [J]. JOURNAL OF SUPERCRITICAL FLUIDS, 2009, 49 (02) : 265 - 270
  • [2] Micro and nanotechnologies: a challenge on the way forward to new markets
    Benoit, J
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 51 (1-3): : 254 - 257
  • [3] Micro-scale metallization of high aspect-ratio Cu and Au lines on flexible polyimide substrate by electroplating using SU-8 photoresist mask
    Cho, SH
    Kim, SH
    Lee, JG
    Lee, NE
    [J]. MICROELECTRONIC ENGINEERING, 2005, 77 (02) : 116 - 124
  • [4] A microaccelerometer structure fabricated in silicon-on-insulator using a focused ion beam process
    Daniel, JH
    Moore, DF
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1999, 73 (03) : 201 - 209
  • [5] Neuronal ensemble control of prosthetic devices by a human with tetraplegia
    Hochberg, Leigh R.
    Serruya, Mijail D.
    Friehs, Gerhard M.
    Mukand, Jon A.
    Saleh, Maryam
    Caplan, Abraham H.
    Branner, Almut
    Chen, David
    Penn, Richard D.
    Donoghue, John P.
    [J]. NATURE, 2006, 442 (7099) : 164 - 171
  • [6] ITTERBEEK AV, 1947, PHYSICA, V13, P459
  • [7] Infinite dilution diffusion coefficients of n-hexane, n-heptane and n-octane in polyisobutylene by inverse gas chromatographic measurements
    Jiang, WH
    Liu, H
    Hu, HJ
    Han, SJ
    [J]. EUROPEAN POLYMER JOURNAL, 2001, 37 (08) : 1705 - 1712
  • [8] Supercritical impregnation of polymers
    Kikic, I
    Vecchione, F
    [J]. CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE, 2003, 7 (4-5) : 399 - 405
  • [9] Adhesion properties of Cu/Cr films on polyimide substrate treated by dielectric barrier discharge plasma
    Kim, SH
    Cho, SH
    Lee, NE
    Kim, HM
    Nam, YW
    Kim, YH
    [J]. SURFACE & COATINGS TECHNOLOGY, 2005, 193 (1-3) : 101 - 106
  • [10] Improving electroless Cu via filling with optimized Pd activation
    Lau, P. P.
    Wong, C. C.
    Chan, L.
    [J]. APPLIED SURFACE SCIENCE, 2006, 253 (05) : 2357 - 2361