Low frequency noise suppression in III-V Hall magnetic microsystems with integrated switches

被引:4
作者
Kerlain, Alexandre [1 ]
Mosser, Vincent [1 ]
机构
[1] Itron France, F-92240 Malakoff, France
关键词
Hall sensor; low frequency noise; spinning current; HEMT; excess noise; GaAs; switches; leakage current; magnetic sensor;
D O I
10.1166/sl.2007.056
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We propose in this paper an integrated low frequency noise reduction solution based on the spinning current method in order to improve the noise characteristics of AlGaAs/InGaAs/GaAs Quantum Well Hall Sensors (QWHS). A switching circuit is implemented on the same chip. A noise reduction of 30 dB is obtained around 1 Hz. Although this result is very encouraging, the residual noise is larger than the expected thermal noise floor in 8 mu m devices. This is shown to be correlated with switches leakage currents. For comparison, hybrid microsystems using a discrete QWHS and CMOS switches are shown to have a record noise level of 30 nT/root Hz at 1 Hz at room temperature.
引用
收藏
页码:192 / 195
页数:4
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