The role of temperature ramp-up time before barrier layer growth in optical and structural properties of InGaN/GaN multi-quantum wells

被引:7
|
作者
Xing, Yao [1 ,2 ]
Zhao, Degang [1 ,3 ]
Jiang, Desheng [1 ]
Liu, Zongshun [1 ]
Zhu, Jianjun [1 ,3 ]
Chen, Ping [1 ]
Yang, Jing [1 ]
Liu, Wei [1 ]
Liang, Feng [1 ]
Liu, Shuangtao [1 ]
Zhang, Liqun [4 ]
Wang, Wenjie [5 ]
Li, Mo [5 ]
Zhang, Yuantao [6 ]
Du, Guotong [6 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
[3] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China
[4] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China
[5] China Acad Engn Phys, Microsyst & Terahertz Res Ctr, Chengdu 610200, Sichuan, Peoples R China
[6] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130023, Jilin, Peoples R China
基金
国家重点研发计划;
关键词
InGaN/GaN multiple quantum wells; MOCVD growth method; Photoluminescence; Ramp-up time; QUANTUM; EMISSION; SHIFT;
D O I
10.1016/j.spmi.2018.03.033
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
InGaN/GaN multi-quantum wells (MQWs), a low temperature cap (LT-cap) layer is grown between the InGaN well layer and low temperature GaN barrier layer. During the growth, a temperature ramp-up and ramp-down process is added between LT-cap and barrier layer growth. The effect of temperature ramp-up time duration on structural and optical properties of quantum wells is studied. It is found that as the ramp up time increases, the Indium floating layer on the top of the well layer can be diminished effectively, leading to a better interface quality between well and barrier layers, and the carrier localization effect is enhanced, thereby the internal quantum efficiency (IQE) of QWs increases surprisingly. However, if the ramp-up time is too long, the carrier localization effect is weaker, which may increase the probabilities of carriers to meet with nonradiative recombination centers. Meanwhile, more non radiative recombination centers will be introduced into well layers due to the indium evaporation. Both of them will lead to a reduction of internal quantum efficiency (IQE) of MQWs. (C) 2018 Elsevier Ltd. All rights reserved.
引用
收藏
页码:228 / 234
页数:7
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