Understanding Microwave Surface-Wave Sustained Plasmas at Intermediate Pressure by 2D Modeling and Experiments

被引：29

作者：

Georgieva, Violeta ^{[1
,2
]}

Berthelot, Antonin ^{[2
]}

Silva, Tiago ^{[3
]}

Kolev, Stanimir ^{[2
,4
]}

Graef, Wouter ^{[5
]}

Britun, Nikolay ^{[3
]}

Chen, Guoxing ^{[1
,3
]}

van der Mullen, Joost ^{[1
]}

Godfroid, Thomas ^{[6
]}

Mihailova, Diana ^{[5
]}

van Dijk, Jan ^{[5
]}

Snyders, Rony ^{[3
,6
]}

Bogaerts, Annemie ^{[2
]}

Delplancke-Ogletree, Marie-Paule ^{[1
]}

机构：

[1] Univ Libre Bruxelles, Ecole Polytech Bruxelles, Serv 4MAT, Av FD Roosevelt 50-CP 165-63, B-1050 Brussels, Belgium

[2] Univ Antwerp, Dept Chem, Res Grp PLASMANT, Univ Pl 1, B-2610 Antwerp, Belgium

[3] Univ Mons, ChIPS, Av Nicolas Copernic 1, B-7000 Mons, Belgium

[4] Sofia Univ, Fac Phys, Blvd James Bourchier 5, Sofia 1164, Bulgaria

[5] Eindhoven Univ Technol, Dept Appl Phys, Res Grp EPG, POB 513, NL-5600 MB Eindhoven, Netherlands

[6] Mat Nova Res Ctr, Av Nicolas Copernic 1, B-7000 Mons, Belgium

来源：

PLASMA PROCESSES AND POLYMERS | 2017年 / 14卷 / 4-5期

关键词：

computer modeling; microwave discharges; non-thermal plasma; optical emission spectroscopy (OES); SIMILARITY LAWS; ARGON; COLUMN; DISCHARGES; ELECTRON; PROPAGATION; STERILIZATION; COEFFICIENTS; POPULATIONS; IONIZATION;

D O I：

10.1002/ppap.201600185

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An Ar plasma sustained by a surfaguide wave launcher is investigated at intermediate pressure (200-2667 Pa). Two 2D self-consistent models (quasi-neutral and plasma bulk-sheath) are developed and benchmarked. The complete set of electromagnetic and fluid equations and the boundary conditions are presented. The transformation of fluid equations from a local reference frame, that is, moving with plasma or when the gas flow is zero, to a laboratory reference frame, that is, accounting for the gas flow, is discussed. The pressure range is extended down to 80 Pa by experimental measurements. The electron temperature decreases with pressure. The electron density depends linearly on power, and changes its behavior with pressure depending on the product of pressure and radial plasma size.

引用

页码：4 / 5

页数：25

共 82 条

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[2]

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