High aspect ratio silicon micromachined heat exchanger

被引：0

作者：

Bengtsson, J ^{[1
]}

Wallman, L ^{[1
]}

Laurell, T ^{[1
]}

机构：

[1] Lund Inst Technol, Dept Elect Measurements, S-22100 Lund, Sweden

来源：

MICROREACTION TECHNOLOGY: INDUSTRIAL PROSPECTS | 2000年

关键词：

micro heat exchanger; PN-etch stop; anisotropic; micro machined; silicon;

D O I：

暂无

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

The fabrication process for a silicon micro machined heat exchanger is descibed. A thin walled, 7 mu m, channel structure defined by vertical channels, 360 mu m deep and 220 mu m wide, anisotropically etched in < 110 >-silicon followed by a pn-etch stop process provided a heat exchanger module in the shape of a "square wave" corrugated membrane. The double sided processing provided vertical channels interdigitated from one side to the other giving a counter flow component with rear side fluid access from the front side. The design allows the stacking of multiple elements to obtain a unit with the desired heat sink capacity.

引用

页码：573 / 577

页数：5

共 50 条

[41] Different aspect ratio pyramidal tips obtained by wet etching of (100) and (111) silicon
Resnik, D
Vrtacnik, D
Aljancic, U
Mozek, M
Amon, S
MICROELECTRONICS JOURNAL, 2003, 34 (5-8) : 591 - 593
[42] Acoustic mode converters micromachined in silicon by proton beam writing
Scholz, U.
Menzel, F.
Pluta, M.
Grill, W.
Butz, T.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2011, 269 (20): : 2452 - 2456
[43] A micromachined silicon multielectrode for multiunit recording
Spence, AJ
Hoy, RR
Isaacson, MS
JOURNAL OF NEUROSCIENCE METHODS, 2003, 126 (02) : 119 - 126
[44] Micromachined Silicon Channels for THz Interconnect
Yu, Bo
Liu, Yuhao
Hu, Xing
Ren, Xiaoxin
Liu, Xiaoguang
Gu, Qun Jane
2014 IEEE 15TH ANNUAL WIRELESS AND MICROWAVE TECHNOLOGY CONFERENCE (WAMICON), 2014,
[45] Silicon micromachined angular rate sensor
Zhang, Fuxue
Wang, Ling
Wen, Jiangchuan
2007 INTERNATIONAL CONFERENCE ON INFORMATION ACQUISITION, VOLS 1 AND 2, 2007, : 17 - 24
[46] New micromachined inductors on silicon substrates
Park, JY
Allen, MG
IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (05) : 3547 - 3549
[47] Ophthalmic tonometer with silicon micromachined structure
Hachol, A
Dziuban, J
Bochenek, A
SENSORS AND ACTUATORS A-PHYSICAL, 1996, 57 (01) : 29 - 33
[48] Collapse Mechanisms for High Aspect Ratio Structures with Application to Clean Processing
Peter, Daniel
Holsteyns, Frank
Dalmer, Michael
Kruwinus, Hans
Lechner, Alfred
Bensch, Wolfgang
CLEANING AND SURFACE CONDITIONING TECHNOLOGY IN SEMICONDUCTOR DEVICE MANUFACTURING 11, 2009, 25 (05): : 241 - 248
[49] High aspect ratio nanoneedle probes with an integrated electrode at the tip apex
Comstock, David J.
Elam, Jeffrey W.
Pellin, Michael J.
Hersam, Mark C.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (11):
[50] Fabrication of nanopore and nanoparticle arrays with high aspect ratio AAO masks
Li, Z. P.
Xu, Z. M.
Qu, X. P.
Wang, S. B.
Peng, J.
Mei, L. H.
NANOTECHNOLOGY, 2017, 28 (09)

← 1 2 3 4 5 →