Phase transformation in ultra-thin films

被引：3
|
作者：
Chakraborty, J. [1 ]
机构：
[1] CSIR, Natl Met Lab, Div Mat Sci & Technol, Jamshedpur 831007, Bihar, India
来源：
RESIDUAL STRESSES IX | 2014年 / 996卷
关键词：
Phase transformation; thin films; film thickness; Gibbs free energy; MULTILAYERS; TITANIUM; TEXTURE; STRESS;
D O I：
10.4028/www.scientific.net/AMR.996.860
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Thickness dependent structural phase transformation in thin polycrystalline metal films has been reviewed. Various effects of film thickness reduction on film microstructure have been identified. Film thickness dependent structural phase transformation has been treated thermodynamically taking polycrystalline titanium (Ti) thin film as model example.
引用
收藏
页码：860 / 865
页数：6
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