Uncertainty in measurement of semiconductor piezoresistive sensors

被引：2
|
作者：
Hoa, PLP [1 ]
Gerlach, G [1 ]
Suchaneck, G [1 ]
机构：
[1] Dresden Univ Technol, Inst Solid State Elect, D-01062 Dresden, Germany
来源：
MICROSYSTEM TECHNOLOGIES | 2003年 / 9卷 / 03期
关键词：
Measurement Uncertainty; Physical Relationship; Requirement Document; Respective Measurement;
D O I：
10.1007/s00542-002-0239-x
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The analysis of the measurement uncertainty of piezoresistive sensors should be performed according to the ISO "Guide to the Expression of Uncertainty in Measurement" (GUM) and the requirement document EAL-R2 of the 'European co-operation for Accreditation of Laboratories'. In this work, the derivation of a model of the physical relationships between quantities in the respective measurement is demonstrated for the case of a piezoresistive sensor. The model is used to evaluate the uncertainty in measurement of semiconductor piezoresistive sensors.
引用
收藏
页码：210 / 214
页数：5
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