Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)

被引：1

作者：

Campanella, Humberto ^{[1
]}

Nouet, Pascal ^{[2
]}

de Paco, Pedro ^{[3
]}

Uranga, Arantxa ^{[4
]}

Barniol, Nuria ^{[4
]}

Esteve, Jaume ^{[1
]}

机构：

[1] CSIC, CNM, Ctr Nacl Microelect, Campus UAB, Bellaterra 08193, Spain

[2] LIRMM, CNRS, UMR UM2, Montpellier, France

[3] Univ Autonoma Barcelona, Telecommun Engn Dept, Bellaterra, Spain

[4] Univ Autonoma Barcelona, Dept Elect Engn, Bellaterra, Spain

来源：

2007 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, PROCEEDINGS | 2007年

关键词：

D O I：

10.1109/ICMTS.2007.374474

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Electrical on-wafer characterization in FBAR is automated by means of a wide-band parameter extraction algorithm, in order to define a complete characterization vehicle for FBAR and MEMS resonators. A model of FBAR-substrate losses is proposed and an automation algorithm implementing a multi-step least-squares strategy is presented. Extraction of the equivalent-circuit parameters is performed from experimental s-parameter data acquired by a microwave network analyzer. The results of FBAR and substrate characterization are presented, and the basis of an integrated test vehicle is discussed.

引用

页码：157 / +

页数：3

共 14 条

[1] Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators [J].

Campanella, Humberto ;

Esteve, Jaume ;

Montserrat, Josep ;

Uranga, Arantxa ;

Abadal, Gabriel ;

Barniol, Nuria ;

Romano-Rodriguez, Albert .

APPLIED PHYSICS LETTERS, 2006, 89 (03)

[2] An ultra-low-power injection locked transmitter for wireless sensor networks [J].

Chee, Yuen Hui ;

Niknejad, Ali M. ;

Rabaey, Jan M. .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2006, 41 (08) :1740-1748

[3]

Dubois M.-A., 2005, IEEE INT SOLID STATE, P392

[4] PROPERTIES OF MICROSTRIP LINE ON SI-SIO2 SYSTEM [J].

HASEGAWA, H ;

FURUKAWA, M ;

YANAI, H .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1971, MT19 (11) :869-+

[5] Resonator size effects on the TFBAR ladder filter performance [J].

Kim, KW ;

Gu, MG ;

Yook, JG ;

Park, HK .

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2003, 13 (08) :335-337

[6]

KOMPA G, 1992, IEEE MTT S INT MICR, P293

[7]

KONDOH H, 1986, IEEE MTT S INT MICR, P377

[8] ACOUSTIC BULK WAVE COMPOSITE RESONATORS [J].

LAKIN, KM ;

WANG, JS .

APPLIED PHYSICS LETTERS, 1981, 38 (03) :125-127

[9]

Larson JD, 2000, ULTRASON, P863, DOI 10.1109/ULTSYM.2000.922679

[10] Extraction of material parameters in film bulk acoustic resonator (FBAR) using genetic algorithm [J].

Lee, J ;

Jung, J ;

Park, JI ;

Kim, H .

IEEE ELECTRON DEVICE LETTERS, 2004, 25 (02) :67-69

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