Study of plasma expansion induced by femtosecond pulsed laser ablation and deposition of diamond-like carbon films

被引：33

作者：

Loir, AS

Garrelie, F

Subtil, JL

Goutaland, F

Belin, M

Le Harzic, R

Donnet, C

Ouerdane, Y

Rogemond, F

Laporte, P

机构：

[1] Univ St Etienne, CNRS UMR 5516, Lab Traitement Signal & Instrumentat, F-42023 St Etienne 02, France

[2] Ecole Cent Lyon, CNRS UMR 5513, Lab Tribol & Dynam Syst, F-69134 Ecully, France

来源：

APPLIED SURFACE SCIENCE | 2003年 / 208卷

关键词：

DLC; pulsed laser deposition; plasma;

D O I：

10.1016/S0169-4332(02)01380-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Diamond-like carbon (DLC) films were deposited in high vacuum conditions at room temperature, by ablating graphite targets with femtosecond laser pulses. The structure of the films deposited onto silicon substrates were characterized by Raman spectroscopy and X-ray absorption near edge spectroscopy (XANES). Films exhibit unusual structure, Raman spectra showing the presence of nanocrystalline diamond in amorphous matrix. Plasma plume was imaged by a gated ICCD camera in the UV-Visible range. The behavior of the plume shape as well as the kinetic energy of the particles are investigated. The behavior of the expansion dynamics of the plume and the properties of thin films are studied in order to determine the optimal growth conditions for femtosecond pulsed laser deposition of DLC films. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：553 / 560

页数：8

共 26 条

[21] Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition [J].