Fused quartz dissolution rate in silicon melts: influence of boron addition

The influence of boron addition on fused quartz dissolution rate in silicon melts has been investigated. Fused quartz dissolution rate increases with increasing boron concentration by using SiC-coated crucibles. Whereas, in case of fused quartz crucibles, fused quartz dissolution rate decreases with increasing boron concentration. The temperature dependence of fused quartz dissolution rate in boron-doped silicon melts is markedly observed. It has been found that in both cases the fraction of cristobalite area grown on fused quartz rod surface varies widely the fused quartz dissolution rate. (C) 1998 Elsevier Science B.V. All rights reserved.