Discussion on method of optical surface roughness measurement

被引：3
|
作者：
Wang, Chunyang [1 ]
Lv, Dongmei [1 ]
Shi, Hongwei [1 ]
Liu, Xuelian [1 ]
Xin, Ruihao [1 ]
机构：
[1] Changchun Univ Sci & Technol, Coll Elect Informat Engn, Changchun 130000, Peoples R China
来源：
SECOND INTERNATIONAL CONFERENCE ON PHOTONICS AND OPTICAL ENGINEERING | 2017年 / 10256卷
关键词：
surface roughness; Optical elements; Measurement; LIGHT-SCATTERING;
D O I：
10.1117/12.2260711
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In recent years, with the development of modern optics and laser technology, modern industry for optical surface roughness measurement precision of the increasingly high demand, real-time, fast and precise measurement of surface roughness has become constant subject of optical components in processing and test. In this paper, the current method of measuring the surface roughness of optical components were described in detail, including light scattering method, interferometric method, speckle method, and optical stylus method. Besides, the principles and characteristics of different methods were introduced respectively.
引用
收藏
页数：6
相关论文
共 50 条
  • [21] Laser diffraction method of surface roughness measurement
    Ostafiev, V
    Sakhno, S
    Tymchik, G
    Ostafiev, S
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 1997, 63 (1-3) : 871 - 874
  • [22] Measurement of surface roughness profile by a triangulation method
    V. N. Demkin
    V. A. Stepanov
    Measurement Techniques, 2008, 51 : 614 - 617
  • [23] Method of surface roughness measurement based on interferometry
    Zhang, Xi Fang
    Wang, Zheng Ping
    Zhang, Yan E.
    Wang, Li Hui
    Zhang, Yi Min
    FUNDAMENTAL PROBLEMS OF OPTOELECTRONICS AND MICROELECTRONICS III, PTS 1 AND 2, 2007, 6595
  • [24] A new optical technique for roughness measurement on moving surface
    Wang, W
    Wong, PL
    Luo, JB
    Zhang, Z
    TRIBOLOGY INTERNATIONAL, 1998, 31 (05) : 281 - 287
  • [25] An instrument for surface roughness measurement of optical thin films
    Hou, HH
    Kui, Y
    Shao, J
    Fan, ZX
    Optical Design and Testing II, Pts 1 and 2, 2005, 5638 : 638 - 641
  • [26] MEASUREMENT OF OPTICAL SURFACE ROUGHNESS USING COHERENT RADIATION
    KARP, S
    HANKIN, RB
    SPINAK, S
    PISA, EJ
    BARRON, PP
    PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (10): : 1484 - &
  • [27] A NEW OPTICAL METHOD FOR THE MEASUREMENT OF ROUGHNESS OF PAPER SURFACES
    HUYNH, VM
    MILLER, WH
    PROCEEDINGS OF THE SID, 1987, 28 (04): : 471 - 475
  • [28] DISCUSSION OF ERRORS ARISING FROM SURFACE ROUGHNESS IN ELLIPSOMETRIC MEASUREMENT OF REFRACTIVE INDEX OF A SURFACE
    PRIMAK, W
    MCCRACKI.FL
    BENNETT, HE
    SMITH, P
    SURFACE SCIENCE, 1969, 16 : 96 - &
  • [29] A new measurement method for ultrasonic surface roughness measurements
    Forouzbakhsh, F.
    Gatabi, J. Rezanejad
    Gatabi, I. Rezanejad
    MEASUREMENT, 2009, 42 (05) : 702 - 705
  • [30] Quantitative Measurement Method for Ice Roughness on an Aircraft Surface
    Wang, Yuan
    Zhang, Yang
    Wang, Yan
    Zhu, Dongyu
    Zhao, Ning
    Zhu, Chunling
    AEROSPACE, 2022, 9 (12)
12345