Piezoelectric characteristics of CMOS compatible AlN SAW Resonators

被引：0

作者：

Ralib, Aliza Aini Md ^{[1
]}

Pandian, Mohanraj Soundara ^{[2
]}

Ferrer, Eloi Marigo ^{[2
]}

Song, Charlie TayWee ^{[2
]}

Shunmugam, Muniandy ^{[2
]}

Bin Zainuddin, Ahmad Anwar ^{[2
]}

Nordin, Anis Nurashikin ^{[1
]}

机构：

[1] Int Islamic Univ Malaysia, Kulliyyah Engn, Elect & Comp Engn Dept, Kuala Lumpur, Malaysia

[2] Silterra Malaysia, Kulim, Kedah, Malaysia

来源：

2014 ASIA-PACIFIC MICROWAVE CONFERENCE (APMC) | 2014年

关键词：

Aluminium Nitride; CMOS; piezoelectric; surface acoustic wave; coupling coefficient;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, we predict the surface acoustic wave characteristics by 2D COMSOL, finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AlN) was chosen as the piezoelectric material due to its compatibility with CMOS technology and higher phase velocity. The influences of AlN thickness on electromechanical coupling coefficient and phase velocity are discussed. High acoustic velocities (v similar to 5220 m/s) and coupling factors (kappa(2)similar to 0.19%) can be observed for SAW resonator with kh(AIN)similar to 3.9. The measurement results are found to he consistent with FEM results with deviation less than 6% for resonance frequency and phase velocity.

引用

页码：61 / 63

页数：3

共 10 条

[1]

[Anonymous], MECH ICOM 2011 4 INT

[2]

Du X., 2012, THESIS

[3]

Kaletta U. C., 2013, ULTRASONICS, P1

[4]

Kannan T., 2006, FINITE ELEMENT ANAL

[5]

Kar J. P., ALUMINIUM NITRIDE A1

[6]

Kar J. P., ALUMINUM NITRIDE A1N

[7] AlN on silicon based surface acoustic wave resonators operating at 5 GHz [J].

Neculoiu, D. ;

Mueller, A. ;

Deligeorgis, G. ;

Dinescu, A. ;

Stavrinidis, A. ;

Vasilache, D. ;

Cismaru, A. M. ;

Stan, G. E. ;

Konstantinidis, G. .

ELECTRONICS LETTERS, 2009, 45 (23) :1196-1197

[8]

NORDIN AN, 2007, MICROWAVE THEORY TEC, V55, P992, DOI DOI 10.1109/TMTT.2007.895408

[9]

Tigli O., FINITE ELEMENT MODEL, V2, P1021

[10]

VISSER JH, 1989, ULTR S 1989 P IEEE 1, P195

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