Tunable self-organization of nanocomposite multilayers

被引:31
作者
Chen, C. Q. [1 ]
Pei, Y. T. [1 ]
Shaha, K. P. [1 ]
De Hosson, J. Th M. [1 ]
机构
[1] Univ Groningen, Dept Appl Phys, Mat Innovat Inst, NL-9747 AG Groningen, Netherlands
关键词
carbon; multilayers; nanocomposites; nanofabrication; phase separation; self-assembly; sputter deposition; titanium compounds; transmission electron microscopy; ENHANCED DIFFUSION; THIN-FILMS; CARBON; COATINGS; GROWTH;
D O I
10.1063/1.3318262
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this letter we report the controlled growth and microstructural evolution of self-assembled nanocomposite multilayers that are induced by surface ion-impingement. The nanoscale structures together with chemical composition, especially at the growing front, have been investigated with high-resolution transmission electron microscopy. Concurrent ion impingement of growing films produces an amorphous capping layer 3 nm in thickness where spatially modulated phase separation is initiated. It is shown that the modulation of multilayers as controlled by the self-organization of nanocrystallites below the capping layer, can be tuned through the entire film.
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页数:3
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