Nature of Dopants and Effects on Sensitivity of SnO 2 Based Gas Sensor

被引:1
作者
Srivastava, J. K. [1 ]
Pandey, Preeti [1 ]
Mishra, V. N. [1 ]
Dwivedi, R. [1 ]
机构
[1] Banaras Hindu Univ, Inst Technol, Dept Elect Engn, Microelect Res Ctr, Varanasi 221005, Uttar Pradesh, India
关键词
Gas sensor; LPG; Pd; Sensitivity; Tin oxide; Thick film; STANNIC OXIDE CRYSTALS; H BOND ACTIVATION; HYDROCARBON OXIDATION; LPG; CATALYSTS;
D O I
10.4103/0377-2063.59170
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, a thick film SnO 2 sensor was fabricated on a 1" x 1" alumina substrate. It consists of a gas sensitive layer (SnO 2 ) doped with Pd and Pt; a pair of electrodes in array form underneath the gas sensing layers serves as a contact pad for sensor and a common heater element on the backside of the substrate. Alumina substrate (96) has been used as a substrate for sensor fabrication. The fabricated sensor was tested for varying concentration of LPG and methane in a locally developed test chamber. The response of sensors to varying concentration of LPG and methane was studied at 350 C. The Pd-doped sensor was found to be more sensitive towards LPG and methane.
引用
收藏
页码:299 / 303
页数:5
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