Real three-dimensional microstructures fabricated by photopolymerization of resins through two-photon absorption

被引:140
作者
Sun, HB
Kawakami, T
Xu, Y
Ye, JY
Matuso, S
Misawa, H
Miwa, M
Kaneko, R
机构
[1] Univ Tokushima, Satellite Venture Business Lab, Tokushima 7708506, Japan
[2] Univ Tokushima, Grad Sch Engn, Dept Ecosyst Engn, Tokushima 7708506, Japan
[3] Wakayama Univ, Fac Syst Engn, Dept Optmechatron, Wakayama 6408510, Japan
关键词
D O I
10.1364/OL.25.001110
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Effective energy windows for two-photon absorption (TPA) photopolymerization of resins were investigated and, with a properly selected laser pulse energy, exquisite three-dimensional (3D) microstructures with submicrometer spatial resolution were achieved. The results show the inherent utility of TPA in the fabrication of real 3D patterns. In particular, we propose and utilize a resin pre-exposure technique by which freely movable components affixed to an axle are built, demonstrating a new application of TPA in laser microfabrication. (C) 2000 Optical Society of America OCIS codes: 220.3740, 220.4000, 230.4000, 160.4330, 190.4180, 160.5470.
引用
收藏
页码:1110 / 1112
页数:3
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