Investigations of the spark assisted chemical engraving

被引:55
作者
Fascio, V [1 ]
Langen, HH
Bleuler, H
Comninellis, C
机构
[1] Ecole Polytech Fed Lausanne, IPR, LSR0, CH-1015 Lausanne, Switzerland
[2] Delft Univ Technol, NL-2628 CD Delft, Netherlands
[3] Ecole Polytech Fed Lausanne, SB ISP, UGEC, CH-1015 Lausanne, Switzerland
关键词
current/voltage measurements; potential perturbation method; glass microstructuring;
D O I
10.1016/S1388-2481(03)00018-3
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The spark assisted chemical engraving (SACE) of glass has been investigated using current/voltage measurements combined with photographs of the tool electrode under different regimes. Depending on the applied potential, different domains have been identified. At low potentials (<10 V) a cone-shaped region containing finely dispersed hydrogen gas is formed around the tool cathode. At high potentials (>25 V) there are strong current fluctuations mainly due to bubble coalescence. We speculate that in this regime, due to the ohmic heating, the temperature in the vicinity of the tool electrode reaches the boiling point of the electrolyte resulting in the generation of water vapour bubbles. These bubbles cover the active surface area of the tool electrode, leading to blanketing (i.e., isolation between tool and electrolyte). Once the bubbles dislodge from the tool surface, contact between the electrolyte and tool is re-established and the cycle will be repeated. This last region (>25 V) is the working domain of the SACE. Finally some examples of glass machining are given to demonstrate the potential application of this technology. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:203 / 207
页数:5
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