Numerial simulation of 3D's flow field to disk-type molecular pumps with arc channel based on DSMC method

被引:0
|
作者
Liu Bo [1 ]
Ba Dechun [1 ]
Zhong Liang [1 ]
机构
[1] Northwestern Univ, Coll Mech Engn & Automat, Shenyang 110004, Peoples R China
来源
Vacuum Metallurgy and Surface Engineering, Proceedings | 2007年
关键词
disk-type molecular pumps; arc channel; 3D's flow field; numerical simulation; DSMC;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper, we made research of numerial simulation of 3D's flow field to Disk-Type molecular pumps with arc channel adopting DSMC method. At first, the geometrial model was introduced. Then, it was described to some problems which must be resolved to Numerial Simulation of 3D's Flow Field to Disk-Type Molecular Pumps with arc channel using DSMC Method. At last, we discuss the pumping performance influced by various factor, included construction, rotational speed and reflect model in the surface of disc, and present the guide recommendations to design of Disk-Type molecular pumps with arc channel.
引用
收藏
页码:338 / 342
页数:5
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