Programmable Nanopatterns by Controlled Debonding of Soft Elastic Films

被引:16
作者
Bhandaru, Nandini [1 ]
Sharma, Ashutosh [2 ,3 ]
Mukherjee, Rabibrata [1 ]
机构
[1] Indian Inst Technol Kharagpur, Dept Chem Engn, Instabil & Soft Patterning Lab, Kharagpur 721302, W Bengal, India
[2] Indian Inst Technol Kanpur, Dept Chem Engn, Kanpur 208016, Uttar Pradesh, India
[3] Indian Inst Technol Kanpur, Nanosci Ctr, Kanpur 208016, Uttar Pradesh, India
关键词
soft lithography; nanopatterning; debonding; contact instability; elastic film; INDUCED SELF-CONSTRUCTION; CONTACT INSTABILITY; SUPERHYDROPHOBIC SURFACES; PATTERN-FORMATION; LITHOGRAPHY; ADHESION; MINIATURIZATION; NANOSTRUCTURES; FABRICATION; TOPOGRAPHY;
D O I
10.1021/acsami.6b09127
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report a facile patterning technique capable of creating nanostructures with different feature heights (h(S)), periodicities (lambda(S)), aspect ratios (A(R)), and duty ratios (D-R), using a single grating stamp with fixed feature height h(P) and periodicity lambda(P). The proposed method relies on controlling the extent of debonding and morphology of the contact instability features, when a rigid patterned stamp is gradually debonded from a soft elastic film to which it was in initial conformal contact. Depending on whether the instability wavelength (lambda(F) scales with the film thickness h(F) as lambda(F) approximate to 3h(F)) and the periodicity of the stamp feature (lambda(P)) are commensurate or not, it is possible to obtain features along each stamp protrusion when lambda(F) approximate to lambda(P) or patterns that span several stripes of the stamp when lambda(F) > lambda(P). In both cases, the patterns fabricated during debonding are taller than the original stamp features (h(S) > h(P)). We show that h(S) can be modulated by controlling the extent of debonding as well as the shear modulus of the film (mu). Additionally, when lambda(F) > lambda(P), progressive debonding leads to the gradual peeling of replicated features, which, in turn, allows possible tuning of the duty ratio (D-R) of the patterns. Finally we show that by the simultaneous modulation of A(R), D-R, and h(S), it becomes possible to create surfaces with controlled wettability.
引用
收藏
页码:19409 / 19416
页数:8
相关论文
共 43 条
[1]   Lithographic Tuning of Polymeric Thin Film Surfaces by Stress Relaxation [J].
Bhandaru, Nandini ;
Roy, Sudeshna ;
Harikrishnan, Suruchi G. ;
Mukherjee, Rabibrata .
ACS MACRO LETTERS, 2013, 2 (03) :195-200
[2]   NANOTRIBOLOGY - FRICTION, WEAR AND LUBRICATION AT THE ATOMIC-SCALE [J].
BHUSHAN, B ;
ISRAELACHVILI, JN ;
LANDMAN, U .
NATURE, 1995, 374 (6523) :607-616
[3]   Towards optimization of patterned superhydrophobic surfaces [J].
Bhushan, Bharat ;
Nosonovsky, Michael ;
Jung, Yong Chae .
JOURNAL OF THE ROYAL SOCIETY INTERFACE, 2007, 4 (15) :643-648
[4]   Fabrication of a dense array of tall nanostructures over a large sample area with sidewall profile and tip sharpness control [J].
Choi, Chang-Hwan ;
Kim, Chang-Jin .
NANOTECHNOLOGY, 2006, 17 (21) :5326-5333
[5]   Lithographically induced self-construction of polymer microstructures for resistless patterning [J].
Chou, SY ;
Zhuang, L ;
Guo, LJ .
APPLIED PHYSICS LETTERS, 1999, 75 (07) :1004-1006
[6]   Ultrafast and direct imprint of nanostructures in silicon [J].
Chou, SY ;
Keimel, C ;
Gu, J .
NATURE, 2002, 417 (6891) :835-837
[7]   Generation of sub-micrometer-scale patterns by successive miniaturization using hydrogels [J].
Das, Apurba Lal ;
Mukherjee, Rabibrata ;
Katiyer, Vivek ;
Kulkarni, Manish ;
Ghatak, Animangsu ;
Sharma, Ashutosh .
ADVANCED MATERIALS, 2007, 19 (15) :1943-+
[8]   Tunable hydrodynamic characteristics in microchannels with biomimetic superhydrophobic (lotus leaf replica) walls [J].
Dey, Ranabir ;
Raj, Kiran M. ;
Bhandaru, Nandini ;
Mukherjee, Rabibrata ;
Chakraborty, Suman .
SOFT MATTER, 2014, 10 (19) :3451-3462
[9]   Micromolding Surface-Initiated Polymerization: A Versatile Route for Fabrication of Coatings with Microscale Surface Features of Tunable Height [J].
Escobar, Carlos A. ;
Cooksey, Tyler J. ;
Spellings, Matthew P. ;
Jennings, G. Kane .
ADVANCED MATERIALS INTERFACES, 2014, 1 (07)
[10]   Meniscus instability in a thin elastic film [J].
Ghatak, A ;
Chaudhury, MK ;
Shenoy, V ;
Sharma, A .
PHYSICAL REVIEW LETTERS, 2000, 85 (20) :4329-4332