Modeling of the synthesis and subsequent growth of nanoparticles in dusty plasmas

被引：0

作者：

De Bleecker, Kathleen ^{[1
]}

Bogaerts, Annemie ^{[1
]}

机构：

[1] Univ Antwerp VIB, Dept Chem, PLASMANT, B-2610 Antwerp, Belgium

来源：

HIGH TEMPERATURE MATERIAL PROCESSES | 2007年 / 11卷 / 01期

关键词：

particle formation; dusty plasmas; numerical modeling; nanoparticles;

D O I：

10.1615/HighTempMatProc.v11.i1.20

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The initial mechanisms of dust formation in radiofrequency acetylene (C2H2) plasmas are investigated by means of a self-consistent 1D fluid model. Possible routes for particle growth are discussed and a comparison with particle formation in silane (SiH4) discharges is made. The model considers a set of 39 species, including neutrals, radicals, ions and electrons, describing hydrocarbons (CnHm) containing up to 12 carbon atoms. Both successive anion/cation - molecule reactions seem to lead to a fast build up of the carbon skeleton.

引用

页码：21 / 36

页数：16

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