Nanopillar Fabrication with Focused Ion Beam Cutting

被引：12
作者：
Kuzmin, Oleksii V. [1 ]
Pei, Yutao T. [1 ]
De Hosson, Jeff T. M. [1 ]
机构：
[1] Univ Groningen, Mat Innovat Inst M2i, Dept Appl Phys, Zernike Inst Adv Mat, NL-9747 AG Groningen, Netherlands
来源：
MICROSCOPY AND MICROANALYSIS | 2014年 / 20卷 / 05期
关键词：
nanopillars; focused ion beam; metallic glass; TEM; METALLIC-GLASS; SIZE; MICROSCOPY;
D O I：
10.1017/S1431927614001032
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A versatile method to fabricate taper-free micro-/nanopillars of large aspect ratio was developed with focused ion beam (FIB) cutting. The key features of the fabrication are a FIB with an incident angle of 90 degrees to the long axis of the pillar that enables milling of the pillar sideways avoiding tapering and the FIB current can be reduced step by step so as to reduce possible radiation damage of the milled surface by Ga ions. A procedure to accurately determine the cross-section of each pillar was developed.
引用
收藏
页码：1581 / 1584
页数：4
相关论文
共 16 条
  • [1] Effects of size on the mechanical response of metallic glasses investigated through in situ TEM bending and compression experiments
    Chen, C. Q.
    Pei, Y. T.
    De Hosson, J. T. M.
    [J]. ACTA MATERIALIA, 2010, 58 (01) : 189 - 200
  • [2] Intrinsic size effects in the mechanical response of taper-free nanopillars of metallic glass
    Chen, Chang Qiang
    Pei, Yu Tao
    Kuzmin, Oleksii
    Zhang, Zhe Feng
    Ma, Evan
    De Hosson, Jeff Th M.
    [J]. PHYSICAL REVIEW B, 2011, 83 (18)
  • [3] Advances in Transmission Electron Microscopy: In Situ Straining and In Situ Compression Experiments on Metallic Glasses
    De Hosson, Jeff Th. M.
    [J]. MICROSCOPY RESEARCH AND TECHNIQUE, 2009, 72 (03) : 250 - 260
  • [4] FOCUSED ION-BEAM IMAGING OF GRAIN-GROWTH IN COPPER THIN-FILMS
    GUPTA, J
    HARPER, JME
    MAUER, JL
    BLAUNER, PG
    SMITH, DA
    [J]. APPLIED PHYSICS LETTERS, 1992, 61 (06) : 663 - 665
  • [5] Three-dimensional analysis of porous BaTiO3 ceramics using FIB nanotomography
    Holzer, L
    Indutnyi, F
    Gasser, PH
    Münch, B
    Wegmann, M
    [J]. JOURNAL OF MICROSCOPY, 2004, 216 : 84 - 95
  • [6] Focused-ion-beam-based rapid prototyping of nanoscale magnetic devices
    Khizroev, S
    Litvinov, D
    [J]. NANOTECHNOLOGY, 2004, 15 (03) : R7 - R15
  • [7] Size effects and ductility of Al-based metallic glass
    Kuzmin, O. V.
    Pei, Y. T.
    De Hosson, J. T. M.
    [J]. SCRIPTA MATERIALIA, 2012, 67 (04) : 344 - 347
  • [8] Intrinsic and extrinsic size effects in the deformation of metallic glass nanopillars
    Kuzmin, O. V.
    Pei, Y. T.
    Chen, C. Q.
    De Hosson, J. T. M.
    [J]. ACTA MATERIALIA, 2012, 60 (03) : 889 - 898
  • [9] In situ compression study of taper-free metallic glass nanopillars
    Kuzmin, O. V.
    Pei, Y. T.
    De Hosson, J. T. M.
    [J]. APPLIED PHYSICS LETTERS, 2011, 98 (23)
  • [10] TEM sample preparation and FIB-induced damage
    Mayer, Joachim
    Giannuzzi, Lucille A.
    Kamino, Takeo
    Michael, Joseph
    [J]. MRS BULLETIN, 2007, 32 (05) : 400 - 407
12