Effect of treatment temperature on surface wettability of methylcyclosiloxane layer formed by chemical vapor deposition

被引:11
作者
Ishizaki, Takahiro [1 ]
Sasagawa, Keisuke [2 ]
Furukawa, Takuya [2 ]
Kumagai, Sou [2 ]
Yamamoto, Erina [2 ]
Chiba, Satoshi [2 ]
Kamiyama, Naosumi [2 ]
Kiguchi, Takayoshi [2 ]
机构
[1] Shibaura Inst Technol, Coll Engn, Dept Mat Sci & Engn, Koto Ku, 3-7-5 Toyosu, Tokyo 1358548, Japan
[2] Shibaura Inst Technol, Grad Sch Sci & Engn, Dept Mat Sci & Engn, Koto Ku, 3-7-5 Toyosu, Tokyo 1358548, Japan
基金
日本学术振兴会;
关键词
1,3,5,7-Tetramethylcyclotetrasiloxane; CVD; Contact angle hysteresis; Hydrophobicity; Superhydrophobicity; SUPERHYDROPHOBIC SURFACE; POLYMERIZATION; OCTAMETHYLCYCLOTETRASILOXANE; CYCLOSILOXANES; FABRICATION; RESISTANCE; REPELLENT;
D O I
10.1016/j.apsusc.2016.03.149
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The surface wettability of the native Si oxide surfaces were tuned by chemical adsorption of 1,3,5,7-tetramethylcyclotetrasiloxane (TMCTS) molecules through thermal CVD method at different temperature. Water contact angle measurements revealed that the water contact angles of the TMCTS-modified Si oxide surfaces at the temperature of 333-373 K were found to be in the range of 92 +/- 2-102 +/- 2 degrees. The advancing and receding water contact angle of the surface prepared at 333 K were found to be 97 +/- 2/92 +/- 2 degrees, showing low contact angle hysteresis surface. The water contact angles of the surfaces prepared at the temperature of 373-413 K increased with an increase in the treatment temperature. When the treatment temperature was more than 423 K, the water contact angles of TMCTS-modified surfaces were found to become more than 150 degrees, showing superhydrophobic surface. AFM study revealed that the surface roughness of the TMCTS-modified surface increased with an increase in the treatment temperature. This geometric morphology enhanced the surface hydrophobicity. The surface roughness could be fabricated due to the hydrolysis/condensation reactions in the gas phase during CVD process. The effect of the treatment temperature on the reactivity of the TMCTS molecules were also investigated using a thermogravimetric analyzer. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:446 / 451
页数:6
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