Optical sensing by optimized silicon slot waveguides

被引：307
作者：
Dell'Olio, Francesco [1 ]
Passaro, Vittorio M. N. [1 ]
机构：
[1] Politecn Bari, Dipartimento Elettrotecn & Elettron, I-70125 Bari, Italy
来源：
OPTICS EXPRESS | 2007年 / 15卷 / 08期
关键词：
D O I：
10.1364/OE.15.004977
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A theoretical investigation of silicon-on-insulator nanometer slot waveguides for highly sensitive and compact chemical and biochemical integrated optical sensing is proposed. Slot guiding structures enabling high optical confinement in a low-index very small region are demonstrated to be very sensitive to either cover medium refractive index change or deposited receptor layer thickness increase. Modal and confinement properties of slot waveguides have been investigated, considering also the influence of fabrication tolerances. Waveguide sensitivity has been calculated and compared with that exhibited by other silicon nanometer guiding structures, such as rib or wire waveguides, or with experimental values in literature. (c) 2007 Optical Society of America.
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收藏
页码：4977 / 4993
页数：17
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