共 28 条
[1]
A FULLY AUTOMATED HOT-WALL MULTIPLASMA-MONOCHAMBER REACTOR FOR THIN-FILM DEPOSITION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1991, 9 (04)
:2331-2341
[3]
CECH V, 1997, THESIS TU BRNO
[4]
CECH V, 1994, P 8 ISCMP VARN, P620
[5]
DETERMINATION OF MIDGAP DENSITY OF STATES IN A-SI-H USING SPACE-CHARGE-LIMITED CURRENT MEASUREMENTS
[J].
JOURNAL DE PHYSIQUE,
1981, 42 (NC4)
:451-454
[10]
JUSKA G, 1996, J NONCRYST SOLIDS, V198, P202