Enhancing the electrical conduction in amorphous carbon and prospects for device applications

被引:45
作者
Silva, SRP [1 ]
Carey, JD [1 ]
机构
[1] Univ Surrey, Sch Elect & Phys Sci, Adv Technol Inst, Guildford GU2 7XH, Surrey, England
基金
英国工程与自然科学研究理事会;
关键词
amorphous carbon; conduction; field emission; devices;
D O I
10.1016/S0925-9635(03)00016-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The problems and possible solutions associated with producing practical electronic devices based upon amorphous carbon (a-C) thin films are discussed. The clustering of the carbon sp(2) phase is shown to be a critical aspect in understanding the current device limitations. In order to exploit the sp(2) clustering we show that the use of ion beams to deposit energy into the microstructure in a controlled manner, as opposed to conventional thermal anneal treatments, results in a delocalised electron wavefunction and an enhancement of conductivity. A barrier controlled device is demonstrated by carefully choosing the ion energy and dose. One of the consequences of ion implantation is that film can now be considered as consisting of conductive sp(2) C clusters within an insulating sp(3) C matrix. We show that the presence of this dielectric inhomogeneity between the conductive sp(2) regions and the sp' matrix plays an important role in understanding the field emission behaviour from a-C based materials. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:151 / 158
页数:8
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