Ideally Hexagonally Ordered TiO2 Nanotube Arrays

被引：16

作者：

Sopha, Hanna ^{[1
]}

Samoril, Tomas ^{[2
]}

Palesch, Erik ^{[2
]}

Hromadko, Ludek ^{[1
]}

Zazpe, Raul ^{[1
]}

Skoda, David ^{[2
]}

Urbanek, Michal ^{[2
]}

Ng, Siowwoon ^{[1
]}

Prikryl, Jan ^{[1
]}

Macak, Jan M. ^{[1
]}

机构：

[1] Univ Pardubice, Fac Chem Technol, Ctr Mat & Nanotechnol, Nam Cs Legii 565, Pardubice 53002, Czech Republic

[2] Brno Univ Technol, Cent European Inst Technol, Purkynova 123, Brno 61200, Czech Republic

来源：

CHEMISTRYOPEN | 2017年 / 6卷 / 04期

基金：

欧洲研究理事会;

关键词：

anodization; focused ion beam milling; hexagonal ordering; TiN protecting layers; TiO2 nanotube layers; POROUS ALUMINA; ANODIC ALUMINA; ANODIZATION; TITANIUM; FABRICATION; ELECTROLYTES; LITHOGRAPHY; SURFACE;

D O I：

10.1002/open.201700108

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Ideally hexagonally ordered TiO2 nanotube layers were produced through the optimized anodization of Ti substrates. The Ti substrates were firstly covered with a TiN protecting layer prepared through atomic layer deposition (ALD). Pre-texturing of the TiN-protected Ti substrate on an area of 20 x 20 mu m(2) was carried out by focused ion beam (FIB) milling, yielding uniform nanoholes with a hexagonal arrangement throughout the TiN layer with three different interpore distances. The subsequent anodic nanotube growth using ethylene-glycol-based electrolyte followed the pre-textured nanoholes, resulting in perfectly ordered nanotube layers (resembling honeycomb porous anodic alumina) without any point defects and with a thickness of approximately 2 mu m over the whole area of the pattern.

引用

页码：480 / 483

页数：4

共 27 条

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