Influence of complexing agents on texture formation of electrodeposited copper

Ethylenediaminetetraacetic acid (EDTA) and sodium citrate were used as complexing agents for copper coated on Ni-P substrate via the electrodeposited copper procedure. X-ray diffraction (XRD) has been used to examine the effect of complexing agents on the texture of copper films. The experimental results showed that copper films deposited without any additives have two different texture types, (111) and (110) textures. And, the textures change from (111) orientation to (110) as the film thickness increases. Two texture components, (111) and (110), were observed in the copper films deposited with EDTA and sodium citrate. Then, the formation of (111) and (110) textures and the change in the texture from (111) to (110) can be explained by the kinetic theory of 2D and 3D nucleation. (C) 2007 Elsevier B.V. All rights reserved.