Short-time piezoelectric measurements in ferroelectric thin films using a double-beam laser interferometer

被引:43
作者
Gerber, P [1 ]
Roelofs, A [1 ]
Lohse, O [1 ]
Kügeler, C [1 ]
Tiedke, S [1 ]
Böttger, U [1 ]
Waser, R [1 ]
机构
[1] Rhein Westfal TH Aachen, Inst Mat Elect Engn & Informat Technol 2, D-52074 Aachen, Germany
关键词
D O I
10.1063/1.1544415
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
An evolution of the double-beam laser interferometer used for piezoelectric measurements in ferroelectric thin films is reported. Measuring the d(33) hysteresis of a ferroelectric material using lock-in technique with large time constants requires a varying bias field to be applied to the sample over a long period of time. This long-term application leads to electrical stress during the measurement. We present a measurement technique using a different source for the applied field and a varied method for averaging the interferometric response. The measurement time for a complete d(33) hysteresis will be shortened down to several seconds. Also, the cycle frequency becomes comparable to electrical hysteresis measurements. Experimental results on quartz and Pb(Zr-(X),Ti(1-X))O-3 are given to demonstrate the capabilities of the interferometer and the new measurement method. (C) 2003 American Institute of Physics.
引用
收藏
页码:2613 / 2615
页数:3
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