Effects of Heat-treatment on Mechanical Properties and Corrosion Resistance of NbN Films

被引：4
|
作者：
Cui, Xiufang [1 ]
Cui, Huawei [1 ]
Guo, Tianshi [1 ]
Liu, Erbao [2 ]
Shao, Tianmin [3 ]
Jin, Guo [1 ]
机构：
[1] Harbin Engn Univ, Sch Mat Sci & Chem Engn, Inst Surface Interface Sci & Technol, Harbin 150001, Peoples R China
[2] Harbin Engn Univ, Sch Mat Sci & Chem Engn, Ctr Biomed Mat & Engn, Harbin 150001, Peoples R China
[3] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China
来源：
INTERNATIONAL FEDERATION FOR HEAT TREATMENT AND SURFACE ENGINEERING (20TH CONGRESS) | 2013年 / 50卷
基金：
中国国家自然科学基金; 黑龙江省自然科学基金;
关键词：
NbN films; heat-treatment; mechanical property; corrosion resistance; structure; ANNEAL TEMPERATURE; RESIDUAL-STRESS; THIN-FILMS; ALLOYS; AIR;
D O I：
10.1016/j.phpro.2013.11.067
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
The NbN and Nb films are prepared by the technique of radio frequency (RF) magnetron sputtering and heat-treated at 300 degrees C and 400 degrees C respectively in the present work. The influences of heat-treatment on the morphology, chemical composition, structure, nanomechanical properties and corrosion resistance of the films are studied. Results show that the particles in the films prepared by the above method are all in nano-size. The polygon shaped particles in the Nb films are very thin and small, while the particles in the NbN films prepared under the same condition are pebble-like, larger, and more compact. The nanomechanical properties and corrosion resistance of both the films are improved apparently after the heat-treatment. The corrosion resistance and mechanical properties of NbN film are always better than those of Nb film. The mechanism about the heat-treatment on the property considering the structural evolution is also discussed in this paper. (C) 2013 The Authors. Published by Elsevier B.V.
引用
收藏
页码：433 / 437
页数：5
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