Atomic control of TiO2 (110) surface by oxygen plasma treatment

被引：30

作者：

Gan, S ^{[1
]}

Liang, Y ^{[1
]}

Baer, DR ^{[1
]}

机构：

[1] Pacific NW Natl Lab, Environm Mol Sci Lab, Richland, WA 99352 USA

来源：

SURFACE SCIENCE | 2000年 / 459卷 / 03期

关键词：

alkaline earth metals; plasma processing; surface structure; morphology; roughness; and topography; titanium oxide;

D O I：

10.1016/S0039-6028(00)00415-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Segregation of impurities in TiO2 substrates impacts the local atomic structure and stoichiometry of the native TiO2 surfaces. We investigated the effects of oxygen plasma on the TiO2 surfaces. It was found that annealing TiO2 crystals in oxygen plasma at above 500 degrees C effectively removed calcium and carbon contaminants, and dramatically improved the surface morphology and stoichiometry. Scanning tunneling micrographs revealed atomically smooth surfaces with well-defined step-terrace morphology after the plasma treatment, while X-ray photoelectron spectra showed that all the Ti cations on the resulting surfaces were fully coordinated. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：L498 / L502

页数：5

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