Characteristics of Iron-Palladium alloy thin films deposited by magnetron sputtering

被引：18

作者：

Chiu, Y-J ^{[1
]}

Shen, C-Y ^{[2
]}

Chang, H-W ^{[3
]}

Jian, S-R ^{[4
]}

机构：

[1] Xiamen Univ Technol, Sch Mech & Automot Engn, 600 Ligong Rd, Xiamen 361024, Fujian, Peoples R China

[2] Hsiuping Univ Sci & Technol, Dept Elect Engn, Taichung 412, Taiwan

[3] Natl Chung Cheng Univ, Dept Phys, Chiayi 621, Taiwan

[4] I Shou Univ, Dept Mat Sci & Engn, Kaohsiung 840, Taiwan

来源：

RESULTS IN PHYSICS | 2018年 / 9卷

关键词：

FePd alloy thin films; Nanoindentation; Magnetic properties; Surface energy; NANOINDENTATION; TRANSITION; SILICON; ZNSE;

D O I：

10.1016/j.rinp.2018.02.024

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The microstructural features, magnetic, nanomechanical properties and wettability behaviors of Iron-Palladium (FePd) alloy thin films are investigated by using X-ray diffraction (XRD), atomic force microscopy (AFM), vibrating sample magnetometer (VSM), nanoindentation and water contact angle (CA) techniques, respectively. The FePd alloy thin films were deposited on glass substrates using a magnetron sputtering system. The post-annealing processes of FePd alloy thin films were carried out at 400 degrees C and 750 degrees C and resulted in a significant increase of both the average grain size and surface roughness. The XRD analysis showed that FePd alloy thin films exhibited a predominant (111) orientation. The magnetic field dependence of magnetization of all FePd thin films are measured at room temperature showed the ferromagnetic characteristics. The nanoindentation with continuous stiffness measurement (CSM) is used to measure the hardness and Young's modulus of present films. The contact angle (hCA) increased with increasing surface roughness. The maximum theta(C Lambda) of 75 degrees was achieved for the FePd alloy thin film after annealing at 750 degrees C and a surface roughness of 4.2 nm. (C) 2018 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license.

引用

页码：17 / 22

页数：6

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