Simple and low cost fabrication of thermally stable polymeric multimode waveguides using a UV-curable epoxy

Polymeric multimode waveguides were fabricated using a UV-curable epoxy based polymer (SU-8) as the core layer and Cyclotene as the cladding layer. Contact printing lithography was adopted for the fabrication as a simple and low cost process. The materials are thermally stable up to 200degreesC as evidenced by the little change in refractive index at the temperature under an atmospheric condition. The propagation loss of the multimode waveguide was 0.36dB/cm at the wavelength of 830nm. A micro-mirror was also fabricated by contact printing method with tilted exposure.