Micro-deformable mirror for adaptive optics systems on extremely large telescopes

Different research groups around the world are currently involved in the design of extremely large optical telescopes, ranging from 30 to 100m. In order to restore diffraction limited images, this next generation of telescopes highly relies on upgraded adaptive optics (AO) systems. For an efficient AO system, high-order perturbation correction is needed. This can be achieved by the development of new technologies based on micro-opto-electro-mechanical systems (MOEMS). We describe this new technology and analyze the abilities of the main candidates to reach the specifications required. By listing the key parameters, we establish advantages and disadvantages of different MOEMS architectures. In order to characterize these micro-optical components, we are developing a bench set-up for electrical and optical tests, including a new surface characterization method based on the knife-edge test.