GaN-based UV/blue electroluminescent devices deposited on Si at low temperature

被引:3
作者
Aoki, Y [1 ]
Hama, M [1 ]
Koike, A [1 ]
Tomonari, M [1 ]
Honda, T [1 ]
Kawanishi, H [1 ]
机构
[1] Kogakuin Univ, Dept Elect Engn, Hachioji, Tokyo 1920015, Japan
来源
5TH INTERNATIONAL SYMPOSIUM ON BLUE LASER AND LIGHT EMITTING DIODES, PROCEEDINGS | 2004年
关键词
D O I
10.1002/pssc.200405008
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
GaN layers were grown on (111)Si substrates at 450 degreesC by compound source molecular beam epitaxy (CS-MBE). Streaky reflection high-energy electron diffraction (RHEED) patterns of the GaN layers were observed after the growth. The results indicate the growth of a hexagonal GaN crystal on a Si substrate and the effectiveness of CS-MBE in the fabrication of GaN layers at low temperature. GaN-based electroluminescent devices (ELDs) using CS-MBE were fabricated on the Si substrates. Purplish blue emission was observed from the ELDs under the AC operation. (C) 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:2409 / 2412
页数:4
相关论文
共 15 条
[1]   Crystal growth and conductivity control of group III nitride semiconductors and their application to short wavelength light emitters [J].
Akasaki, I ;
Amano, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1997, 36 (9A) :5393-5408
[2]   GaN growth by compound source molecular beam epitaxy [J].
Honda, T ;
Sato, K ;
Hashimoto, T ;
Shinohara, M ;
Kawanishi, H .
JOURNAL OF CRYSTAL GROWTH, 2002, 237 (1-4 II) :1008-1011
[3]  
Honda T, 2002, PHYS STATUS SOLIDI A, V192, P461, DOI 10.1002/1521-396X(200208)192:2<461::AID-PSSA461>3.0.CO
[4]  
2-M
[5]  
Honda T, 2000, IPAP CONFERENCE SER, V1, P644
[6]  
ICHIMIYA A, 1987, SURF SCI, V192, pL893, DOI 10.1016/S0039-6028(87)81122-6
[7]   Optical properties of InGaN based multiple quantum wells on low threading dislocation density GaN films fabricated by air-bridged lateral epitaxial growth [J].
Ishibashi, A ;
Sugahara, G ;
Kawaguchi, Y ;
Yamada, Y ;
Taguchi, T ;
Yokogawa, T .
5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS, 2003, 0 (07) :2116-2119
[8]   Thermal stability of GaN on (111) Si substrate [J].
Ishikawa, H ;
Yamamoto, K ;
Egawa, T ;
Soga, T ;
Jimbo, T ;
Umeno, M .
JOURNAL OF CRYSTAL GROWTH, 1998, 189 :178-182
[9]   Molecular beam epitaxial growth of GaN on (0001) Al2O3 using an ultrathin amorphous buffer layer deposited at low temperature [J].
Kimura, R ;
Takahashi, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (3A) :1039-1043
[10]  
Krost A, 2002, PHYS STATUS SOLIDI A, V194, P361, DOI 10.1002/1521-396X(200212)194:2<361::AID-PSSA361>3.0.CO