[1] Zhejiang Univ, Key Lab Soft Machines & Smart Devices Zhejiang Pr, Ctr X Mech, Hangzhou 310027, Peoples R China
[2] Zhejiang Univ, Dept Engn Mech, Hangzhou 310027, Peoples R China
[3] Zhejiang Univ, State Key Lab Fluid Power & Mech Syst, Hangzhou 310027, Peoples R China
[4] Southwest Jiaotong Univ, Sch Mech & Engn, Appl Mech & Struct Safety Key Lab Sichuan Prov, Chengdu 610031, Peoples R China
[5] Harvard Univ, Kavli Inst Bionano Sci & Technol, John A Paulson Sch Engn & Appl Sci, Cambridge, MA 02138 USA