THE DEVELOPMENT OF A 3-DIMENSIONAL VIBRATION MEASURING SYSTEM WITH CORNER CUBES AND QUADRANT DETECTORS

被引：2

作者：

Chen, Shang-Liang ^{[2
]}

Jywe, Wen-Yuh ^{[1
]}

Hsieh, Tung-Hsien ^{[2
]}

Liu, Chien-Hung ^{[3
]}

Huang, Hsueh-Liang ^{[4
]}

Hsu, Tung-Hui ^{[5
]}

Jeng, Yeau-Ren ^{[5
]}

Wang, Ming-Shi ^{[4
]}

机构：

[1] Natl Formosa Univ, Inst Mech & Electromech Engn, Yunlin 632, Taiwan

[2] Natl Cheng Kung Univ, Inst Mfg Informat & Syst, Tainan 701, Taiwan

[3] Natl Formosa Univ, Grad Inst Electroopt & Mat Sci, Yunlin 632, Taiwan

[4] Natl Cheng Kung Univ, Dept Engn Sci, Tainan 701, Taiwan

[5] Natl Chung Cheng Univ, Dept Mech Engn, Chiayi 621, Taiwan

来源：

JOURNAL OF THE CHINESE INSTITUTE OF ENGINEERS | 2010年 / 33卷 / 01期

关键词：

vibrometer; 3-dimensional; quadrant detector; corner cube;

D O I：

10.1080/02533839.2010.9671598

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.

引用

页码：71 / 80

页数：10

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